PhD scholarship in Smooth Advanced Silicon NEMS Devices

DTU Danchip
tirsdag 08 aug 17

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Frist 15. september 2017
Du kan søge om jobbet ved DTU Danchip ved at udfylde den efterfølgende ansøgningsformular.

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The Center for Electron Nanoscopy and the National Center for Nano- and Microfabrication at the Technical University of Denmark (DTU Cen/Danchip) are seeking a PhD student to study, optimize and master the annealing process and to reproduce ‘the old’ but also create novel NEMS devices.

Directional plasma etch processes are important for many state-of-the-art micromachined devices with critical dimensions of a few microns and less. From these processes, the so-called Bosch etch is probably the most popular technique in cleanroom facilities today in which a repetitive cycle of conformal deposition and isotropic etching results in typical scallops of the etched features.

But, due to inherent isotropic undercutting, the Bosch cycle is not well suited to form nanoscale devices. However in 2004 it has been demonstrated, that the scallops can be smoothened out in a hydrogen anneal process which ensures a much better performance of the requested nanoscale devices.

Furthermore, besides removing roughness, some interesting phenomena occur after prolonged annealing such as the formation of perfectly round shaped silicon beams, crystalline silicon balls due to dewetting and buried channels or cavities in bulk silicon.

Responsibilities and tasks
For the successful candidate the quest will be to develop a fundamental understanding of the special challenges involved in surface smoothening at the nanoscale including the physics and chemistry involved. The aim is to establish a generic knowledge platform for nanoscale smoothening for future applications. The major part of this project will be related to experimental work in the cleanroom facility at DTU Danchip and to demonstrate the ability in some state-of-the-art and novel NEMS applications. Emerging applications include 1) resonators and sensors for physical and bio-chemical sensing down to the molecular level both because of the much reduced mass, 2) nanowires for novel transistors and photovoltaics increasingly exploring quantum effects starting at the sub-50nm level, and 3) nanostructures for photonics (around the wavelength of the guided photons) and next generation storage (10nm and below). For this, the PhD candidate will utilize nanoscale silicon patterns fabricated in our modern high-density plasma tool. This structure is smoothened and reshaped using a to-be-established anneal tool. The PhD candidate has to master and optimize this tool and to show the ability of Danchip to create and reproduce novel NEMS devices. As a PhD student at DTU, the first task will be direct involvement in the detailed definition and planning of the project. You can read more about the project in the following project description:

Candidates should have a master's degree in Physics, Chemistry, Materials Science, Chemical Engineering or a similar degree with an academic level equivalent to the master's degree in Physics, Chemistry, Materials Science, Chemical Engineering.

Approval and Enrolment
The scholarships for the PhD degree are subject to academic approval, and the candidates will be enrolled in one of the general degree programmes of DTU. For information about the general requirements for enrolment and the general planning of the scholarship studies, please see the DTU PhD Guide.

The assessment of the applicants will be made by Associate Professor Flemming Jensen and Professor Henri Jansen.

We offer
We offer an interesting and challenging job in an international environment focusing on education, research, public-sector consultancy and innovation, which contribute to enhancing the economy and improving social welfare. We strive for academic excellence, collegial respect and freedom tempered by responsibility. The Technical University of Denmark (DTU) is a leading technical university in northern Europe and benchmarks with the best universities in the world.

Salary and appointment terms
The salary and appointment terms are consistent with the current rules for PhD degree students. The period of employment is 3 years and must be started in 2017.

The workplace during the PhD project will mainly be at DTU Danchip, Lyngby Campus

Further information
Further information may be obtained from Professor Henri Jansen, / phone: + 45 9351 1931.

You can read more about Center for Electron Nanoscopy on and Danchip on

Please submit your online application no later than 15 September 2017. Applications must be submitted as one pdf file containing all materials to be given consideration. To apply, please open the link "Apply online," fill in the online application form, and attach all your materials in English in one pdf file. The file must include:

  • A letter motivating the application (cover letter)
  • Curriculum vitae
  • Grade transcripts and BSc/MSc diploma (an official translation into English)
  • Excel sheet with translation of grades to the Danish grading system (see guidelines and excel spreadsheet here)

Candidates may apply prior to obtaining their master's degree, but cannot begin before having received it.

All interested candidates irrespective of age, gender, race, disability, religion or ethnic background are encouraged to apply.

The Center for Electron Nanoscopy is a state-of-the-art electron microscopy center at the Technical University of Denmark. Work carried out at DTU Cen ranges from basic topographical studies to highly sophisticated analysis of nanoscale materials.

DTU Danchip is the National Center for Micro- and nanofabrication at the Technical University of Denmark. 1300 m2 of cleanroom equipped with more than 140 of state of the art tools are shared among more than 400 users from industry and academia.

DTU is a technical university providing internationally leading research, education, innovation and scientific advice. Our staff of 5,800 advance science and technology to create innovative solutions that meet the demands of society; and our 10,600 students are being educated to address the technological challenges of the future. DTU is an independent academic university collaborating globally with business, industry, government, and public agencies.
19 AUGUST 2017