DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.
DRY ETCH TOOL PACKAGE TRAINING |
SCHEDULE |
Theoretical part
- A 3-hour lecture. The next 3 hour lecture is on the 8th May, 2018 from 9:00 to approximately 12. Sign up via:Dry Etch TPT Lecture doodle. Room: B345C-R121C
Practical part
- A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
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LOCATION |
Theoretical part
Practical part
- The training session takes place inside the cleanroom. The meeting point will be in The gowning area
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QUALIFIED PREREQUISITES |
- Cleanroom safety course at DTU Danchip
- Admission to the cleanroom must be obtained before the training session
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PREPARATIONS |
Before the lecture
Before training session
- Watch the training video: TPT hands-on intro
- Watch the screen cast video's for the ASE/AOE software:See below
- Watch the screen cast video's for the DRIE/ICP meat and III-V ICP: See below
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COURSE RESPONSIBLE |
The Dry Etch Group at DTU Danchip.
If you have questions you can contact us by e-mailingdryetch@danchip.dtu.dk.
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LEARNING OBJECTIVES |
- Know why and when to use dry etching
- Use the dry etchers without harming the machines
- Select the right instrument to use for his/her dry etch processing
- Select an appropriate etch recipe for his/her dry etch processing
- Spot when the recipe needs to be tuned for his/her needs and
- Suggest relevant tuning parameters
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Material for preparations and further information
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Literature
- No extra Literature at the moment
Pre Lecture video
Slides from Lecture
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Pre hands-on training videos
Screen cast videos for the DRIE, ICP metal and III-V ICP:
Screen cast videos for the ASE and AOE:
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