Acquisition of EPS150Triax probestation

Thursday 09 Oct 14
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Contact

Anders Michael Jørgensen
Deputy Director, Head of Customer Support, Ph.D.
DTU Danchip
+45 45 25 58 59

Danchip has signed a contract with CascadeMicrotech (www.cmicro.com) for an EPS150Triax (https://www.cmicro.com/products/probe-systems/150mm-wafer/150mm-probe-stations) probe station (LabManager no: 8.051).

The new probe station is expected to arrive before the end of 2014 and will most likely be released for usage in the first quarter of 2015. The new tool will replace both the very old black probe stand and the Süss probe station in the main cleanroom. The EPS150 is intended for general usage and will be equipped with Wentworth manipulators as standard.

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