Dry Etch Training

DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.

 

DRY ETCH TOOL PACKAGE TRAINING
SCHEDULE

Theoretical part

  • A 3-hour lecture. The next 3 hour lecture is on the 20th of February from 9:00 to approximately 12. Sign up via: Dry Etch TPT Lecture doodle. Room: B345C-R121C

Practical part

  • A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
LOCATION

Theoretical part

  • Room: 345C-R121A

Practical part

  • The training session takes place inside the cleanroom. The meeting point will be in The gowning area
QUALIFIED PREREQUISITES
  • Cleanroom safety course at DTU Danchip
  • Admission to the cleanroom must be obtained before the training session
PREPARATIONS

Before the lecture

Before training session

  • Watch the training video: TPT hands-on intro
  • Watch the screen cast video's for the ASE/AOE software:See below
  • Watch the screen cast video's for the DRIE/ICP meat and III-V ICP: See below
COURSE RESPONSIBLE

The Dry Etch Group at DTU Danchip.

If you have questions you can contact us by e-mailing dryetch@danchip.dtu.dk.

LEARNING OBJECTIVES
  • Know why and when to use dry etching
  • Use the dry etchers without harming the machines
  • Select the right instrument to use for his/her dry etch processing
  • Select an appropriate etch recipe for his/her dry etch processing
  • Spot when the recipe needs to be tuned for his/her needs and
  • Suggest relevant tuning parameters

 

Material for preparations and further information

Literature

  • No extra Literature at the moment

Pre Lecture video

Slides from Lecture

Pre hands-on training videos

Screen cast videos for the DRIE, ICP metal and III-V ICP:

Screen cast videos for the ASE and AOE:

 


Tidspunkt

tir 20 feb 18
9:00 - 12:00

Arrangør

Kontaktperson

Hvor

B345C-R121C
http://www.danchip.dtu.dk/kalender/arrangement?id=c4d886c6-f83b-4aab-9348-825a67eec55b
25 MAJ 2018